Rohde & Schwarz debuts semiconductor test solution

1 min read

The test equipment maker has announced a new on-wafer device characterization solution for the testing of semiconductors.

The new solution combines the R&S ZNA vector network analyzer from Rohde & Schwarz with engineering probe systems from FormFactor. 

The  R&S®ZNA vector network analyzer characterizes all RF qualification parameters at coaxial and waveguide levels, as well as frequency extenders for application ranges above 67 GHz. FormFactor addresses the wafer contact with manual, semi-automated and fully automated probe systems including thermal control, high-frequency probes, probe positioners, and calibration tools. The calibration of the complete test system, including the R&S ZNA, is fully supported in the FormFactor WinCal XE calibration software.

This solution is intended to aid semiconductor manufacturers perform reliable and repeatable on-wafer device characterization in the development phase, during product qualification and in production.

5G RF front-end designers aim to ensure proper RF capabilities for frequency coverage and output power while optimizing energy efficiency. Rohde & Schwarz have said it is still investigating the RF design to get early design feedback, assessing the performance and capabilities already on the wafer level. Characterizing a DUT in an on-wafer environment requires a measurement system which includes a vector network analyzer (VNA), a probe station, RF probes, cables or adapters, a dedicated calibration method as well as calibration substrates for the particular DUT or application.

In the test setup, the user has access to all test capabilities of the R&S ZNA. Generic S-parameter tests allow characterization for filters and active devices, but distortion, gain and intermodulation tests can also be performed to qualify power amplifiers. Frequency translating measurements for mixers with phase characterization across the bandwidth of the device are supported measurement applications of the joint solution.

Results can be taken from the VNA without postprocessing as the calibration data are applied directly to the VNA. Frequency extenders from Rohde & Schwarz open up sub-THz frequencies such as D-band, currently in the focus of 6G research. The extenders will be integrated to the probe station to ensure shortest cabling and enable optimal dynamic range while avoiding losses due to cabling to the probe tip.